Fomblin®Inert Vacuum Pump FluidsYLVAC25/6 14/6 0

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Fomblin® PFPE vacuum pump fluids are non-flammable, chemically inert, and thermally stable.
When used with proper pump filtration, Fomblin PFPE vacuum pump oils provide exceptionally
long service life. These fluids have excellent lubricity properties and are available in viscosity grades
suitable for use in all vacuum pumps. Consult your Inlａnd sales representative or engineer for assistance
in selecting the proper viscosity grade for your specific pump and application.

Fomblin® Y LVAC Inert Vacuum Pump Fluids

Fomblin Y L VAC is an inert perfluorinated fluid mixture with a hexafluoropropylene base. Because the
chemical chain contains only carbon, fluorine, and oxygen, it exhibits excellent physical properties,
including excellent lubricity and minimal backstreaming.

Applications:

• Semiconductors
• Chemical pumping (lewis acids)
• Oxygen pumping (YL-VAC and YL-VAC RP)
• LPCVD
• Reactive ion etching
• Plasma etching